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| Series | Flow rate characteristics 2→3(OUT→EXH) C[dm3/(s・bar)] | Flow rate characteristics 2→3(OUT→EXH) b | Flow rate characteristics 2→3(OUT→EXH) Cv | Power consumption (W) | For use in vacuum applications |
|---|---|---|---|---|---|
| VP3145 | 26 | 0.35 | 7.0 | 12 | -101.2 kPa |
| VP3165 | Effective area: 330 mm2 | Effective area: 330 mm2 | Effective area: 330 mm2 | 12 | -101.2 kPa |
| VP3185 | Effective area: 670 mm2 | Effective area: 670 mm2 | Effective area: 670 mm2 | 12 | -101.2 kPa |